Positioning Stage
[Montblanc Series]
Special Inspection Actual Values
We would like to introduce a small portion of the special inspection performance data we have measured in response to requests from our customers in various business fields. Our sales and design staff will select a model, propose modifications, and perform the following accuracy measurements to meet your operation requirements.
Analysis/Analysis/Various Inspection and Evaluation Equipment
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Theta Stage PDF view Eccentricity, Surface Runout, Runout of Rotation Axis
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View Movie RA10A-W Runout of rotary axis
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View Movie RA10A-W Eccentricity
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X Stage PDF view Constant Velocity with Harmonic Stepping Motor, Servo Motor
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X Stage PDF view Constant Velocity
Lamination, Assembly and Production Equipment
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X + θ Stages PDF view Accuracy Change under Offset Load
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XYθ+Z Stages PDF view Accuracy Change with Offset Load
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Z Stage PDF view Accuracy Variation with Offset Load
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Z Stage PDF view Movement When Overloaded 1
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Z Stage PDF view Movement When Overloaded 2
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Swivel Stage PDF view Accuracy in Ceiling-Suspended (Upside-Down) Installation
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X Stage PDF view Position Repeatability of 1600 Micro Round Trips in Vertical Installation
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X Stage PDF view Position Repeatability in Micro Round Trips Feedback Control
Alignment/Image Processor
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Theta Stage PDF view Minute Feed Accuracy, Origin Repeatability with Motor with Encoder
Camera / Lens / Optics / Alignment
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X Stage PDF view Rolling Reproducibility
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X Stage PDF view Pitching Comparison between No Load and 25kg Load
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X Stage PDF view Table Position Displacement under Load
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Z Stage PDF view Position Stability over a Long Period of Time with 3kg Load
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X Stage PDF view Reproducibility of Straightness
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X Stage PDF view Running Parallelism Variation with Load