DY-2000RC/DY-3000RC Measurement Records

Wafer Form Measurement Solution

As shown in the list below, we have experience in measurement of various materials. We also offer sample measurements at any time, so please contact us for more information.

Measurement Examples

Legend for Measurement Items: ◎: Optimum, ◎: Possible, △: Partially Possible, O: Strong

Category	Material / Article	Status	Size		Measurement Items^{1 2}
Category	Material / Article	Status	XY	T	Surface Profile	SORI	BOW	WARP	Thickness	TTV	GBIR
Semiconductor (Wafer)	Si SIC GaN Sapphire(Al2O3) Ga2O3 GaAs Si3N4 LT(LiTaO3) LN(LiNbO3) Glass Crystal(SiO2) InP AlN Diamond(C) CdTe	Polished Grinded CoinRoll As Slice Etched Patterned Laminated Bonded CVD TAIKO MEM	<Φ12inch	1<T<800 [um]	◎	◎	◎	◎	◎	◎	◎
Semiconductor (Plastic)	Plastic Film Redin Resist Glue	Laminated Bonded	<Φ12inch	1<T<2000 [um]	◎	◎	◎	◎	◎	◎	◎

*1 Items that can be measured may vary depending on the material and surface conditions. Sample measurement is available, so please contact us.
*2 Custom-made equipment may be designed and manufactured to enable measurement of items that normally cannot be measured, so please contact us.

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