Alignment Stages
YRA-200
Price
ASK
-
Drawing For Download
Connect Fig File
Specification (Mechanical)
Model Number
YRA-200
Mirror Model Number
-
Table Size
210mm×150mm
Guide Mechanism
XY：Linear Guide θ：cross roller bearings
Motion Range
XY：±5mm θ：±5°
Lead Mechanism
Ball Screw, Lead 1.0mm
Resolution Full/Half Step
XY：1μm/0.5μm θ: 0.000498°/0.000249°
Maximum Speed
XY：10mm/sec : Half 20kpps θ：4.98°/sec : Half 20kpps
Repeatability
X：≦±0.5μm（AVE. ±0.133μm） Y：≦±0.5μm（AVE. ±0.186μm）
Lost Motion
X：≦ 2μm（AVE. 0.666μm） Y：≦ 2μm（AVE. 1.097μm） θ：≦ 0.005°（AVE. 0.0013°）
Straightness (Horizontal)
X：≦ 3μm/10mm（AVE. 0.358μm/10mm） Y：≦ 3μm/10mm（AVE. 0.473μm/10mm）
Straightness (Vertical)
X：≦ 3μm/10mm（AVE. 0.176μm/10mm） Y：≦ 3μm/10mm（AVE. 0.345μm/10mm）
Angular Repeatability
θ：≦ 0.001°（AVE. 0.0001°）
Backlash
X：≦ 1μm（AVE. 0.353μm） Y：≦ 1μm（AVE. 0.589μm） θ：≦ 0.005°（AVE. 0.0008°）
Moment Load Stiffness
X：0.03arcsec／N cm（AVE. 0.029 arcsec/N cm） Y：0.05arcsec／N cm（AVE. 0.013 arcsec/N cm）
Load Capacity
343N (35kgf)
Surface Runout
θ：≦5μm/±5°（AVE. 1.938μm/±5°）
Eccentricity
θ：≦5μm/±5°（AVE. 1.277μm/±5°）
Material
Aluminum Alloy
Finishing
Clear-Matt Anodizing
Weight
5.15kg
Specification (Electrical)
Sensor Model
XY:F-115(HOME, LIMIT), θ:F-115R(HOME, LIMIT)
5 Phase Stepper Motor
Oriental Motor:PK523HPMB
Connector
Hirose: RP13A-12JG-20PC
Overhaul Price
ASK
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
ASK
Vacuum Lubricant Change Price ("-V" at the end of model number)
ASK
Motor Change Option
Same Size Motor Change Price
ASK
Different Size Motor Change Price
ASK
Control Electronics
Motor Controller
See the corresponded motor controller
Motor Driver
See the corresponded motor driver
Motor Cable
See the corresponded motor cable
Remarks and Features
Body thickness: 55mm
Load Capacity (static) ※：1961N (200kgf)
※The workpiece center of gravity is at the center of the stage (vertically equally distributed),
and the load that can be withstood when the workpiece is not in motion.