Alignment Stages
YRA-131
Price
ASK
-
Drawing For Download
Connect Fig File
Specification (Mechanical)
Model Number
YRA-131
Mirror Model Number
-
Table Size
130mm×130mm
Guide Mechanism
XY：Cross Roller Guide θ：cross roller bearings
Motion Range
XY：±5mm θ：±5°
Lead Mechanism
Ball Screw, Lead 1.0mm
Resolution Full/Half Step
XY：1μm/0.5μm θ:0.000674°/0.000337°
Maximum Speed
XY：10mm/sec : Half 20kpps θ：6.74°/sec : Half 20kpps
Repeatability
XY：≦±0.5μm
Lost Motion
XY：≦ 2μm θ：≦ 0.005°
Straightness (Horizontal)
XY：≦ 1μm
Straightness (Vertical)
XY：≦ 1μm
Angular Repeatability
θ：≦ 0.001°
Backlash
XY：≦ 1μm θ：≦ 0.005°
Moment Load Stiffness
XY：0.1arcsec／N cm
Load Capacity
196N (20kgf)
Surface Runout
θ：≦5μm/±5°
Eccentricity
θ：≦3μm/±5°
Material
Aluminum Alloy
Finishing
Clear-Matt Anodizing
Weight
4.5kg
Specification (Electrical)
Sensor Model
XYθ:F-115(HOME, LIMIT)
5 Phase Stepper Motor
Oriental Motor:PK523HPMB
Connector
Hirose: RP13A-12JG-20PC
Overhaul Price
ASK
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
ASK
Vacuum Lubricant Change Price ("-V" at the end of model number)
ASK
Motor Change Option
Same Size Motor Change Price
ASK
Different Size Motor Change Price
ASK
Control Electronics
Motor Controller
See the corresponded motor controller
Motor Driver
See the corresponded motor driver
Motor Cable
See the corresponded motor cable
Remarks and Features
Body thickness: 60mm