Alignment Stages
Price ASK
  • Drawing For Download
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Specification (Mechanical)
Model Number
CYAT-070
Mirror Model Number
-
Table Size
80mm×80mm
Guide Mechanism
Linear Guide
Motion Range
±15mm
Lead Mechanism
Ball Screw, Lead 1.0mm
Resolution Full/Half Step
1μm/0.5μm
Resolution Micro Step (1/20 div)
0.05μm
Maximum Speed
5mm/sec(10kpps/Half)
Accumulated Lead Error
≦15μm/30mm
Repeatability
≦±0.5μm
Lost Motion
≦2μm
Straightness (Horizontal)
≦3μm/30mm
Straightness (Vertical)
≦3μm/30mm
Backlash
≦ 1μm
Moment Load Stiffness
0.3arcsec/N cm
Load Capacity
98N (10kgf)
Material
Aluminum Alloy
Finishing
Clear-Matt Anodizing
Weight
1.7kg
Specification (Electrical)
Sensor Model
F-115(HOME, LIMIT)
5 Phase Stepper Motor
Oriental Motor:PK523HPMB-C4
Connector
Hirose: RP13A-12JG-20PC
Remarks and Features

Body thickness: 30mm