Motorized 6 axis Stages

Compact 6 axis Manipulator [MPS Series]

MPS-SSSD-B010
Example of Use
Assembly of 3-plate LCD projectors, medical cameras, etc.

Features
Emphasizes rigidity, downsizing, and weight reduction.
Height  50% down
Width    40% down
Weight  30% down
Rigidity  30% up
Various requested modifications, such as changing the stroke of the axis for retreat, are available.
Ideal for positioning when attaching elements of LCD projectors and CCD cameras, and for fine positioning when attaching devices.

Watch the product introduction video

Product Specifications

Axis Name	Travel Range *1	Maximum Speed	Resolution *2	Driver Divisions
X	±5mm	1mm/sec	0.1μm	1/10
Y	±5mm	1mm/sec	0.1μm	1/10
Z	±5mm	10mm/sec	0.1μm	1/10
θx	±3°	3.8°/sec	Approx. 0.00038°	1/2
θy	±3°	2.8°/sec	Approx. 0.00028°	1/2
θz	±3°	18°/sec	0.0018°	1/4

*1 The travel range can be extended.
*2 Resolution can be changed by setting the number of driver divisions.

Download Drawing

Axis Configuration(Click on the drawing to enlarge)

Dimensions(Click on the figure to enlarge)

Compact 6 axis Manipulator [SMR Series]

SMR-6B201
Example of Use
Assembly of small camera modules such as mobile and in-vehicle cameras

Features
The 6-axis unit with an integrated automatic XYθ stage is ultra-compact and space-saving.
With few protruding parts, it can be installed in a limited and extremely small space.
Ball screws are used for all axes for increased durability.
Sub-micron accuracy is achieved through design and assembly adjustments that emphasize rigidity.

Advantages of Adoption
Ideal for alignment (image processing) as production/inspection equipment for various electronic components.
Stages with enhanced rigidity provide better positioning accuracy and responsiveness, shortening alignment time and improving production takt time and yield rate.

Watch the product introduction video

Product Specifications

Axis Name	Travel Range	Maximum Speed	Resolution (half step)
X	±3mm	10mm/sec	1μm
Y	±3mm	10mm/sec	1μm
Z	±2.5mm	1.25mm/sec	0.125μm
θx	±5°	11.3°/sec	Approx. 0.000378°
θy	±4.5°	8.5°/sec	Approx. 0.000282°
θz	±3°	12.7°/sec	0.00127°

Download Drawing

Product PDF view

Dimensional Drawings(Click on the drawing to enlarge)

Compact 6 axis Manipulator [USM Series]

USM-R1C-010
Example of Use
Assembly of camera modules and small semiconductor devices

Features
Rigidity-oriented, ultra-compact and lightweight, centralized connector, high tracking performance in positioning.
Compact and lightweight while maintaining high accuracy and rigidity.
Ball screw drive in all axes ensures long life and reproduces stable accuracy for a long period of time.

Centralized Connector Unit

Wiring for motors and sensors for 6 axes are concentrated in one place, facilitating troublesome multi-axis wiring work. (The unit can also be removed when not needed.)

Centralized Connector Unit

Light weight (approx. 3 kg) enables mounting on transport axes operating at high speeds

High Tracking Performance

The system has sub-micron tracking in the linear direction and second tracking in the angular direction, and completes positioning to the commanded value with high accuracy.
Reference example: The follow-up data for a single-pulse feed of a swivel stage shows that the error is within ±0.0002 deg. compared to 0.000797 deg.

Product Specifications

Axis Name	Travel Range	Maximum Speed	Minimum Resolution	Driver Divisions
X	±3mm	10mm/sec	0.1μm	1/20
Y	±3mm	10mm/sec	0.1μm	1/20
Z	±1.5mm	2.5mm/sec	0.025μm	1/20
θ	±3°	12.7°/sec	0.000127°	1/20
α	±3°	9.6°/sec	Approx. 0.0000637°	1/20
β	±3°	12°/sec	Approx. 0.0000797°	1/20