Alignment Stages

What is an alignment stage? A stage that recognizes the difference between the target position (alignment mark) measured by a camera or other means and the current position, and moves the mounted object until the difference becomes less than the specified value.

Performance requirements for alignment stages

In addition to the positioning accuracy required for standard positioning stages, tracking and positional stability are also very important. Since performance in multi-axis combinations is required, simply stacking positioning stages may not provide the necessary performance. It is necessary to select the optimum stage according to the accuracy and positioning time required for alignment.

Types of Alignment Stages

There are three types of alignment stages:

Integrated type in which each of the XYθ axes moves independently
YRA Series

Advantages ・Small size and space saving ・Low overall height ・Light weight ・Easy control due to independent drive of each axis
Stacked single-axis stages
Montblanc Series Combination

Advantages ・Stages that meet the required specifications can be combined from a wide variety of catalog products. ・A wide range of modifications are possible.
Combined operation of 3~4 units for each axis of XYθ axis
RSTA Stage

Advantages ・High tracking performance ・High degree of freedom in size ・Large permeation holes can be secured